JPH0549355B2 - - Google Patents
Info
- Publication number
- JPH0549355B2 JPH0549355B2 JP16630489A JP16630489A JPH0549355B2 JP H0549355 B2 JPH0549355 B2 JP H0549355B2 JP 16630489 A JP16630489 A JP 16630489A JP 16630489 A JP16630489 A JP 16630489A JP H0549355 B2 JPH0549355 B2 JP H0549355B2
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- processing chamber
- solvent
- communication port
- tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004140 cleaning Methods 0.000 claims description 79
- 238000012545 processing Methods 0.000 claims description 59
- 239000002904 solvent Substances 0.000 claims description 58
- 238000004891 communication Methods 0.000 claims description 22
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 20
- 238000005406 washing Methods 0.000 claims description 17
- 238000001816 cooling Methods 0.000 claims description 10
- 238000010438 heat treatment Methods 0.000 claims description 10
- 238000007789 sealing Methods 0.000 claims description 5
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 239000007789 gas Substances 0.000 description 35
- OKTJSMMVPCPJKN-NJFSPNSNSA-N Carbon-14 Chemical class [14C] OKTJSMMVPCPJKN-NJFSPNSNSA-N 0.000 description 9
- 239000007788 liquid Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 238000013020 steam cleaning Methods 0.000 description 6
- 239000003960 organic solvent Substances 0.000 description 3
- 238000001179 sorption measurement Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- BOSAWIQFTJIYIS-UHFFFAOYSA-N 1,1,1-trichloro-2,2,2-trifluoroethane Chemical compound FC(F)(F)C(Cl)(Cl)Cl BOSAWIQFTJIYIS-UHFFFAOYSA-N 0.000 description 1
- XSTXAVWGXDQKEL-UHFFFAOYSA-N Trichloroethylene Chemical group ClC=C(Cl)Cl XSTXAVWGXDQKEL-UHFFFAOYSA-N 0.000 description 1
- 239000003463 adsorbent Substances 0.000 description 1
- 238000003915 air pollution Methods 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16630489A JPH0330881A (ja) | 1989-06-28 | 1989-06-28 | 洗浄装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16630489A JPH0330881A (ja) | 1989-06-28 | 1989-06-28 | 洗浄装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0330881A JPH0330881A (ja) | 1991-02-08 |
| JPH0549355B2 true JPH0549355B2 (en]) | 1993-07-26 |
Family
ID=15828860
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16630489A Granted JPH0330881A (ja) | 1989-06-28 | 1989-06-28 | 洗浄装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0330881A (en]) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10321580A (ja) * | 1997-05-15 | 1998-12-04 | Tokyo Electron Ltd | 基板の洗浄ユニット及び洗浄システム |
| JP2017170425A (ja) * | 2016-03-18 | 2017-09-28 | 株式会社クリンビー | ワーク洗浄方法およびワーク洗浄装置 |
-
1989
- 1989-06-28 JP JP16630489A patent/JPH0330881A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0330881A (ja) | 1991-02-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4983223A (en) | Apparatus and method for reducing solvent vapor losses | |
| US4865061A (en) | Decontamination apparatus for chemically and/or radioactively contaminated tools and equipment | |
| US5180438A (en) | Cleaning and drying system | |
| US5702535A (en) | Dry cleaning and degreasing system | |
| WO1993008933A1 (en) | Improved cleaning method and system | |
| GB2174720A (en) | Method of and apparatus for cleaning garments and soft goods contaminated with nuclear, chemical and/or biological contaminants | |
| JP2019136640A (ja) | 活性炭の性能回復可能性判断方法及び活性炭再生方法並びに活性炭リユースシステム | |
| US4885099A (en) | Closed system solvent stripping and reclaiming apparatus | |
| CA1175319A (en) | Process and apparatus for controlling losses in volatile working fluid systems | |
| JPH0549355B2 (en]) | ||
| JPH0549357B2 (en]) | ||
| US4772357A (en) | System for automatically etching pieces | |
| GB2167056A (en) | Tool decontamination unit for the removal of radioactive, chemical and biological contaminants | |
| JP2000237703A (ja) | 真空洗浄乾燥方法及び装置 | |
| RU2221614C2 (ru) | Способ обеззараживания без сжигания материалов, содержащих опасные вещества (варианты) | |
| US5311891A (en) | Solvent recovering system for a cleaning machine | |
| EP0879313B1 (en) | Filter regeneration and dry cleaning system | |
| JPH0542316B2 (en]) | ||
| JPS61152020A (ja) | 処理装置 | |
| JP2001176731A (ja) | 変圧器の再生方法 | |
| JPS5841399A (ja) | 放射能汚染物の洗浄方法 | |
| JP3436426B2 (ja) | 蒸気洗浄方法 | |
| JPH0331114B2 (en]) | ||
| JPS5933996Y2 (ja) | 脱水装置 | |
| JPH03176A (ja) | 洗浄装置に設置する乾燥装置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |